TY  - GEN
AU  - Wang,Yuting
AU  - Pan,Yao
AU  - Qu,Tianliang
AU  - Jia,Yonglei
AU  - Yang,Kaiyong
AU  - Luo,Hui
TI  - Decreasing Frequency Splits of Hemispherical Resonators by Chemical Etching
SN  - 1424-8220
PY  - 2018///1107
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.3390/s18113772
ER  -