TY  - GEN
AU  - Carney,D J
AU  - Magnusson,R
TI  - Fabrication methods for infrared resonant devices
SN  - 1539-4794
PY  - 2018///1102
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OL.43.005198
ER  -