TY  - GEN
AU  - Filatova,E O
AU  - Sakhonenkov,S S
AU  - Konashuk,A S
AU  - Afanas'ev,V V
TI  - Control of TiN oxidation upon atomic layer deposition of oxides
SN  - 1463-9084
PY  - 2018///1115
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1039/c8cp06076b
ER  -