TY  - GEN
AU  - Li,Yen-Yin
AU  - Lee,Yin-Wen
AU  - Ho,Tuan-Shu
AU  - Wang,Jhih-Hong
AU  - Wu,I-Chou
AU  - Hsu,Ting-Wei
AU  - Chen,Yu-Tung
AU  - Huang,Sheng-Lung
TI  - Spectroscopic characterization of Si/Mo thin-film stack at extreme ultraviolet range
SN  - 1539-4794
PY  - 2018///0817
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OL.43.004029
ER  -