TY  - GEN
AU  - Arends,A A
AU  - Germain,T M
AU  - Owens,J F
AU  - Putnam,S A
TI  - Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature
SN  - 1089-7623
PY  - 2018///0605
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.5021704
ER  -