Arends, A A <br/><br/>
Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature.  [electronic resource] 

 -  The Review of scientific instruments  May 2018 
 - 055117 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.5021704  doi