Reinink, J <br/><br/>
Self-contained in-vacuum in situ thin film stress measurement tool.  [electronic resource] 

 -  The Review of scientific instruments  May 2018 
 - 053904 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.5021790  doi