TY  - GEN
AU  - Tan,Xiao
AU  - Tao,Zhi
AU  - Yu,Mingxing
AU  - Wu,Hanxiao
AU  - Li,Haiwang
TI  - Anti-reflectance investigation of a micro-nano hybrid structure fabricated by dry/wet etching methods
SN  - 2045-2322
PY  - 2018///
PB  - Scientific reports
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1038/s41598-018-26234-6
ER  -