TY  - GEN
AU  - Zhang,Youfeng
AU  - Oh,Yunje
AU  - Stauffer,Douglas
AU  - Polycarpou,Andreas A
TI  - A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements
SN  - 1089-7623
PY  - 2018///0504
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.5021046
ER  -