Zhang, Youfeng <br/><br/>
A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements.  [electronic resource] 

 -  The Review of scientific instruments  Apr 2018 
 - 045109 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.5021046  doi