Bernasconi, Johana <br/><br/>
High-power modular LED-based illumination systems for mask-aligner lithography.  [electronic resource] 

 -  Optics express  Apr 2018 
 - 11503-11512 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.26.011503  doi