Sunday, Christopher E <br/><br/>
Broadband Dielectric Spectroscopic Characterization of Thermal Stability of Low-k Dielectric Thin Films for Micro- and Nanoelectronic Applications.  [electronic resource] 

 -  ECS journal of solid state science and technology : JSS  2017 
 - N155-N162 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>2162-8769 
<br/><br/><label>Standard No.: </label>10.1149/2.0141709jss  doi