TY  - GEN
AU  - Šimonka,Vito
AU  - Hössinger,Andreas
AU  - Weinbub,Josef
AU  - Selberherr,Siegfried
TI  - ReaxFF Reactive Molecular Dynamics Study of Orientation Dependence of Initial Silicon Carbide Oxidation
SN  - 1520-5215
PY  - 2018///0305
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/acs.jpca.7b08983
ER  -