TY  - GEN
AU  - Lee,Hyung-Ik
AU  - Park,Jong-Bong
AU  - Xianyu,Wenxu
AU  - Kim,Kihong
AU  - Chung,Jae Gwan
AU  - Kyoung,Yong Koo
AU  - Byun,Sunjung
AU  - Yang,Woo Young
AU  - Park,Yong Young
AU  - Kim,Seong Min
AU  - Cho,Eunae
AU  - Shin,Jai Kwang
TI  - Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature
SN  - 2045-2322
PY  - 0000///102017///
PB  - Scientific reports
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1038/s41598-017-14291-2
ER  -