Tsai, Yi-Pei <br/><br/>
Charge Splitting In Situ Recorder (CSIR) for Real-Time Examination of Plasma Charging Effect in FinFET BEOL Processes.  [electronic resource] 

 -  Nanoscale research letters  Sep 2017 
 - 534 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1931-7573 
<br/><br/><label>Standard No.: </label>10.1186/s11671-017-2309-0  doi