TY - GEN AU - Duan,Junping AU - Zhu,Qiang AU - Qian,Kun AU - Guo,Hao AU - Zhang,Binzhen TI - Method for Measurement of Multi-Degrees-of-Freedom Motion Parameters Based on Polydimethylsiloxane Cross-Coupling Diffraction Gratings SN - 1931-7573 PY - 2017/// PB - Nanoscale research letters N1 - Publication Type: Journal Article UR - https://doi.org/10.1186/s11671-017-2289-0 ER -