TY  - GEN
AU  - Zyulkov,Ivan
AU  - Krishtab,Mikhail
AU  - De Gendt,Stefan
AU  - Armini,Silvia
TI  - Selective Ru ALD as a Catalyst for Sub-Seven-Nanometer Bottom-Up Metal Interconnects
SN  - 1944-8252
PY  - 2018///0730
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/acsami.7b07811
ER  -