TY  - GEN
AU  - Baudet,E
AU  - Sergent,M
AU  - Němec,P
AU  - Cardinaud,C
AU  - Rinnert,E
AU  - Michel,K
AU  - Jouany,L
AU  - Bureau,B
AU  - Nazabal,V
TI  - Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors
SN  - 2045-2322
PY  - 2018///1214
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1038/s41598-017-03678-w
ER  -