Baudet, E <br/><br/>
Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors.  [electronic resource] 

 -  Scientific reports  06 2017 
 - 3500 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>2045-2322 
<br/><br/><label>Standard No.: </label>10.1038/s41598-017-03678-w  doi