TY  - GEN
AU  - Sakuraba,Masao
AU  - Sugawara,Katsutoshi
AU  - Nosaka,Takayuki
AU  - Akima,Hisanao
AU  - Sato,Shigeo
TI  - Carrier properties of B atomic-layer-doped Si films grown by ECR Ar plasma-enhanced CVD without substrate heating
SN  - 1468-6996
PY  - 2017///
PB  - Science and technology of advanced materials
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1080/14686996.2017.1312520
ER  -