TY  - GEN
AU  - Shida,Kazuki
AU  - Takeuchi,Shotaro
AU  - Imai,Yasuhiko
AU  - Kimura,Shigeru
AU  - Schulze,Andreas
AU  - Caymax,Matty
AU  - Sakai,Akira
TI  - Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction
SN  - 1944-8252
PY  - 2018///0725
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1021/acsami.7b01309
ER  -