Ney, Michael <br/><br/>
Three wavelengths parallel phase-shift interferometry for real-time focus tracking and vibration measurement.  [electronic resource] 

 -  Optics letters  Feb 2017 
 - 719-722 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1539-4794 
<br/><br/><label>Standard No.: </label>10.1364/OL.42.000719  doi