TY  - GEN
AU  - Metzler,Dominik
AU  - Li,Chen
AU  - Engelmann,Sebastian
AU  - Bruce,Robert L
AU  - Joseph,Eric A
AU  - Oehrlein,Gottlieb S
TI  - Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C
SN  - 1089-7690
PY  - 2018///0607
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.4961458
ER  -