TY - GEN AU - Chawla,Vipin AU - Holec,David AU - Mayrhofer,Paul H TI - Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis SN - 0927-0256 PY - 2012/// PB - Computational materials science N1 - Publication Type: Journal Article UR - https://doi.org/10.1016/j.commatsci.2011.11.024 ER -