TY  - GEN
AU  - Luo,Kun
AU  - Chen,Xiangqian
AU  - Peng,Yan
AU  - Zhu,Yiming
TI  - Effects of femtosecond laser pulse width on the formation of microstructured silicon
SN  - 1539-4522
PY  - 2018///0129
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/AO.55.006079
ER  -