TY  - GEN
AU  - Attota,Ravi Kiran
AU  - Weck,Peter
AU  - Kramar,John A
AU  - Bunday,Benjamin
AU  - Vartanian,Victor
TI  - Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy
SN  - 1094-4087
PY  - 2018///0129
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OE.24.016574
ER  -