Attota, Ravi Kiran <br/><br/>
Feasibility study on 3-D shape analysis of high-aspect-ratio features using through-focus scanning optical microscopy.  [electronic resource] 

 -  Optics express  Jul 2016 
 - 16574-85 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1094-4087 
<br/><br/><label>Standard No.: </label>10.1364/OE.24.016574  doi