TY  - GEN
AU  - Wu,Chien-Hung
AU  - Huang,Bo-Wen
AU  - Chang,Kow-Ming
AU  - Wang,Shui-Jinn
AU  - Lin,Jian-Hong
AU  - Hsu,Jui-Mei
TI  - The Performance Improvement of N2 Plasma Treatment on ZrO2 Gate Dielectric Thin-Film Transistors with Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition IGZO Channel
SN  - 1533-4899
PY  - 2016///0822
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1166/jnn.2016.12612
ER  -