TY  - GEN
AU  - Seo,Hyunju
AU  - Han,Jeong-Yeol
AU  - Kim,Sug-Whan
AU  - Seong,Sehyun
AU  - Yoon,Siyoung
AU  - Lee,Kyoungmuk
AU  - Hong,Jinsuk
AU  - Lee,Haengbok
AU  - Bok,Mingab
TI  - Novel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces
SN  - 1094-4087
PY  - 2018///0130
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1364/OE.24.012349
ER  -