TY - GEN AU - Hu,Tengjiang AU - Zhao,Yulong AU - Li,Xiuyuan AU - Zhao,You AU - Bai,Yingwei TI - Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators SN - 1089-7623 PY - 2016///0822 N1 - Publication Type: Journal Article UR - https://doi.org/10.1063/1.4943266 ER -