Hu, Tengjiang <br/><br/>
Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators.  [electronic resource] 

 -  The Review of scientific instruments  Mar 2016 
 - 035001 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.4943266  doi