M Nuzaihan, M N Top-Down Nanofabrication and Characterization of 20 nm Silicon Nanowires for Biosensing Applications. [electronic resource] - PloS one 2016 - e0152318 p. digital Publication Type: Journal Article; Research Support, Non-U.S. Gov't ISSN: 1932-6203 Standard No.: 10.1371/journal.pone.0152318 doi Subjects--Topical Terms: Biosensing Techniques--methodsDNA, Complementary--analysisElectricityElectronsMicrofluidicsMicroscopy, Atomic ForceNanotechnology--methodsNanowires--chemistryParticle SizeSilicon--chemistry