TY  - GEN
AU  - Sudhir,Dass
AU  - Bandyopadhyay,M
AU  - Chakraborty,A
TI  - Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources
SN  - 1089-7623
PY  - 2016///0706
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.4932558
ER  -