Sudhir, Dass <br/><br/>
Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources.  [electronic resource] 

 -  The Review of scientific instruments  Feb 2016 
 - 02B312 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.4932558  doi