TY - GEN AU - Fang,Jiwen AU - Long,Zhili AU - Wang,Michael Yu AU - Zhang,Lufan AU - Dai,Xufei TI - Multi-mode sliding mode control for precision linear stage based on fixed or floating stator SN - 1089-7623 PY - 2016///0706 N1 - Publication Type: Journal Article UR - https://doi.org/10.1063/1.4942641 ER -