TY  - GEN
AU  - Riazanova,A V
AU  - Costanzi,B N
AU  - Aristov,A I
AU  - Rikers,Y G M
AU  - Mulders,J J L
AU  - Kabashin,A V
AU  - Dahlberg,E Dan
AU  - Belova,L M
TI  - Gas-assisted electron-beam-induced nanopatterning of high-quality titanium oxide
SN  - 1361-6528
PY  - 2016///0620
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1088/0957-4484/27/11/115304
ER  -