TY  - GEN
AU  - Ueda,Mario
AU  - da Silva,Ataide Ribeiro
AU  - Pillaca,Elver J D M
AU  - Mariano,Samantha F M
AU  - Oliveira,Rogério de Moraes
AU  - Rossi,José Osvaldo
AU  - Lepienski,Carlos Mauricio
AU  - Pichon,Luc
TI  - New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses
SN  - 1089-7623
PY  - 2016///0526
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1063/1.4939013
ER  -