Ueda, Mario <br/><br/>
New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses.  [electronic resource] 

 -  The Review of scientific instruments  Jan 2016 
 - 013902 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1089-7623 
<br/><br/><label>Standard No.: </label>10.1063/1.4939013  doi