TY  - GEN
AU  - Riha,Shannon C
AU  - Koegel,Alexandra A
AU  - Meng,Xiangbo
AU  - Kim,In Soo
AU  - Cao,Yanqiang
AU  - Pellin,Michael J
AU  - Elam,Jeffrey W
AU  - Martinson,Alex B F
TI  - Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications
SN  - 1944-8252
PY  - 2016///0615
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1021/acsami.5b11075
ER  -