TY  - GEN
AU  - Bossard,M
AU  - Boussey,J
AU  - Le Drogoff,B
AU  - Chaker,M
TI  - Alternative nano-structured thin-film materials used as durable thermal nanoimprint lithography templates
SN  - 1361-6528
PY  - 2016///0526
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1088/0957-4484/27/7/075302
ER  -