Delachat, F <br/><br/>
Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications.  [electronic resource] 

 -  Nanotechnology  Jan 2016 
 - 025304 p.  digital 
<br/><br/> Publication Type: Journal Article; Research Support, Non-U.S. Gov't 
<br/><br/><label>ISSN: </label>1361-6528 
<br/><br/><label>Standard No.: </label>10.1088/0957-4484/27/2/025304  doi