TY  - GEN
AU  - Mashimo,Tomoaki
TI  - Performance evaluation of a micro ultrasonic motor using a one-cubic-millimeter stator
SN  - 1525-8955
PY  - 2016///0712
KW  - Electric Impedance
KW  - Equipment Design
KW  - Miniaturization
KW  - instrumentation
KW  - Motion
KW  - Torque
KW  - Ultrasonics
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.1109/TUFFC.2014.006834
ER  -