Performance evaluation of a micro ultrasonic motor using a one-cubic-millimeter stator. [electronic resource]
- IEEE transactions on ultrasonics, ferroelectrics, and frequency control Oct 2015
- 1819-26 p. digital
Publication Type: Journal Article
1525-8955
10.1109/TUFFC.2014.006834 doi
Electric Impedance Equipment Design Miniaturization--instrumentation Motion Torque Ultrasonics--instrumentation