TY  - GEN
AU  - Park,Jun Hong
AU  - Movva,Hema C P
AU  - Chagarov,Evgeniy
AU  - Sardashti,Kasra
AU  - Chou,Harry
AU  - Kwak,Iljo
AU  - Hu,Kai-Ting
AU  - Fullerton-Shirey,Susan K
AU  - Choudhury,Pabitra
AU  - Banerjee,Sanjay K
AU  - Kummel,Andrew C
TI  - In Situ Observation of Initial Stage in Dielectric Growth and Deposition of Ultrahigh Nucleation Density Dielectric on Two-Dimensional Surfaces
SN  - 1530-6992
PY  - 2016///0217
N1  - Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S
UR  - https://doi.org/10.1021/acs.nanolett.5b02429
ER  -