TY  - GEN
AU  - Yoon,Hyeong-Chul
AU  - Shin,Jin-Ha
AU  - Park,Hwa-Sun
AU  - Suh,Su-Jeong
TI  - The Properties of Cu Thin Films on Ru Depending on the ALD Temperature
SN  - 1533-4899
PY  - 2015///1009
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1166/jnn.2015.9286
ER  -