TY  - GEN
AU  - Han,Jae Hwan
AU  - Song,Jiyong
AU  - Choi,Woo Young
TI  - Scale effects on stiction-induced release voltage shift of nano-electromechanical (NEM) memory cells
SN  - 1533-4880
PY  - 2015///0702
KW  - Electricity
KW  - Finite Element Analysis
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1166/jnn.2014.10162
ER  -