Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment. [electronic resource]
- ACS applied materials & interfaces Jun 2015
- 12030-7 p. digital
Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.