Young, Matthias J

Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment. [electronic resource] - ACS applied materials & interfaces Jun 2015 - 12030-7 p. digital

Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.

1944-8252

10.1021/acsami.5b02167 doi