TY  - GEN
AU  - Filipovic,Lado
AU  - Selberherr,Siegfried
TI  - Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors
SN  - 1424-8220
PY  - 2015///0515
N1  - Publication Type: Journal Article
UR  - https://doi.org/10.3390/s150407206
ER  -