Filipovic, Lado <br/><br/>
Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors.  [electronic resource] 

 -  Sensors (Basel, Switzerland)  Mar 2015 
 - 7206-27 p.  digital 
<br/><br/> Publication Type: Journal Article 
<br/><br/><label>ISSN: </label>1424-8220 
<br/><br/><label>Standard No.: </label>10.3390/s150407206  doi