TY  - GEN
AU  - Xia,Feng
AU  - Zhang,Xinzheng
AU  - Wang,Meng
AU  - Yi,Sanming
AU  - Liu,Qian
AU  - Xu,Jingjun
TI  - Numerical analysis of the sub-wavelength fabrication of MTMO grayscale photomasks by direct laser writing
SN  - 1094-4087
PY  - 2015///0403
N1  - Publication Type: Journal Article; Research Support, Non-U.S. Gov't
UR  - https://doi.org/10.1364/OE.22.016889
ER  -